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Energy dispersive x-ray spectroscopy (EDX)
EDX PC preparation INCA
(1) Sample magnification ~3,000 x, ensure the working distance ~ 8mm, HT 15 kV.
(2) At the Observation/Conditions area, ensure Probe Current at LC mode and value 5 or 6.
(3) Freeze the IR camera by clicking the “Freeze” button on the IR camera software.
(4) Double-click the “INCA” icon; select Full Acquisition Mode.
(5) Select the “Point & ID” or “Mapping” function at the bottom area.
(6) Click “Microscope Setup”, set “Count Rate Optimization” to 6 for Point & ID or 3 for Mapping analysis.
(7) Click “Options”, “Detector Control”, “Slide”, and “Move In” the EDX detector, and ensure the detector is at “Operate” status and “Cold” conditions.
(8) Adjust the X-ray signal by increasing Probe Current LC from 5 or 6 to higher values, from the SEM PC software, until the “Acquisition Rate” is more than 3k cps, with “Dead Time” remaining under 20% -50% (lower is better)
(9)Select an area of analysis.
(10) After analysis, go to Report and select a suitable template.
(11) Export the report to Ward format by clicking on the “W” icon.
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