EDX Spectroscopy and Mapping

STEM Calibration setup

1. Adjust it to be CL2 aperture #1

2. Decide what probe size to use between "4C" and "6C".
   The "4C" probe size is brighter and needs a shorter time for enough signals.

3. You may use Orius for calibration; Exposure time: 0.001 for instant image acquisition.

4. After the A1 and B2 alignment, we shall re-PL align to the detector.

EDX Software

1. Switch on the AZtec software >> New Project >> Browse >> Map.

2. Thermal >> Operate >> Cooling >> Cold
   The EDX Detector works at -20oC, it is cold down by thermal electric coupling.
   Cold Temperature protects the detector and enhances the signal.

3. Scan image >> "Setting AutoSetting": ON >> Drift correction with scan 512; dwell time 10.
   1024 is too slow for drift correction.

4. ADF 1, 512 Always Autolock shift --> time 2X, 4X, and 8X buffer.
   For high magnification: 8X.
   For low magnification: 2X.

5. View >> MinView: Auto Progression; monitoring the MiniView and adjust the focus if drifted
   Drift over time: Sample stage and Focus.

6. You may choose different line Series: K or M to increase the brightness.

7. When finish the EDX characterizations, remove the detector and set it to Standby mode (Room temp)